Development of low power cryogenic readout integrated circuits using fully-depleted- silicon-on-insulator CMOS technology for far-infrared image sensors

We are developing low power cryogenic readout integrated circuits (ROICs) for large format far-infrared image sensors using fully-depleted-silicon-on-insulator (FD-SOI) CMOS technology. We have evaluated the characteristics of MOS FETs fabricated by the FD-SOI CMOS technology and have found that both p-ch and n-ch FETs show good static performance below the liquid helium temperature, where n-ch FETs fabricated by conventional bulk-CMOS technology usually suffer from anomalous behaviors such as kink and hysteresis. We have also designed and fabricated an operational amplifier (OP-AMP) and have successfully demonstrated that the OP-AMP works at the liquid helium temperature with an open loop gain of 7000, a noise of 19µW / √ Hz at 1 Hz, and a power consumption of 1.3 µW.